JPH0617035Y2 - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPH0617035Y2
JPH0617035Y2 JP3178587U JP3178587U JPH0617035Y2 JP H0617035 Y2 JPH0617035 Y2 JP H0617035Y2 JP 3178587 U JP3178587 U JP 3178587U JP 3178587 U JP3178587 U JP 3178587U JP H0617035 Y2 JPH0617035 Y2 JP H0617035Y2
Authority
JP
Japan
Prior art keywords
magnetic bearing
rotor
vacuum side
pump
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3178587U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63140196U (en]
Inventor
浩司 大畑
精 石田
弘道 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP3178587U priority Critical patent/JPH0617035Y2/ja
Publication of JPS63140196U publication Critical patent/JPS63140196U/ja
Application granted granted Critical
Publication of JPH0617035Y2 publication Critical patent/JPH0617035Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP3178587U 1987-03-06 1987-03-06 タ−ボ分子ポンプ Expired - Lifetime JPH0617035Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3178587U JPH0617035Y2 (ja) 1987-03-06 1987-03-06 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3178587U JPH0617035Y2 (ja) 1987-03-06 1987-03-06 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS63140196U JPS63140196U (en]) 1988-09-14
JPH0617035Y2 true JPH0617035Y2 (ja) 1994-05-02

Family

ID=30837838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3178587U Expired - Lifetime JPH0617035Y2 (ja) 1987-03-06 1987-03-06 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0617035Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ

Also Published As

Publication number Publication date
JPS63140196U (en]) 1988-09-14

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